・Actual exhaust speed (at atmospheric pressure): 1,080 L/min at 50 Hz, 1,300 L/min at 60 Hz ・Pressure during continuous operation: 2 x 103 Pa (15 Torr) or less ・Motor: AC200V3φ4P 2.2 kW flange motor ・Intake/exhaust port: VG50/VF50 equivalent ・Weight: Approximately 87 kg (including motor)

・Actual exhaust speed (at atmospheric pressure): 1,080 L/min at 50 Hz, 1,300 L/min at 60 Hz ・Pressure during continuous operation: 2 x 103 Pa (15 Torr) or less ・Motor: AC200V3φ4P 2.2 kW flange motor ・Intake/exhaust port: VG50/VF50 equivalent ・Weight: Approximately 87 kg (including motor)

Depends on sensor specifications

★

★

・Exhaust speed: 6,000L/S (with hydrogen) ・Ultimate pressure: 10-7Pa (10-9 Torr) ・Exhaust capacity: 1.6×10 6 Pa (1.2×104 Torr) ・Inlet flange: UVG-300★

・Exhaust speed: 6,000L/S (with hydrogen) ・Ultimate pressure: 10-7Pa (10-9 Torr) ・Exhaust capacity: 9.8×10 5 Pa (7.4×10 3 Torr) (with hydrogen) ・Inlet flange: UVG-300★

・Exhaust speed: 6,000L/S (with hydrogen) ・Ultimate pressure: 10-7Pa (10-9 Torr) ・Exhaust capacity: 9.8×10 5 Pa (7.4×10 3 Torr) (with hydrogen) ・Inlet flange: UVG-300★

・Input power supply: 3-phase 200V 2.4/2.8kw (50/60Hz) ・Cooling water temperature: 30℃ or less ・Cooling water volume: 180L/h ・Accumulated time: 38635.8h★

・Input power supply: 3-phase 200V 2.4/2.8kw (50/60Hz) ・Cooling water temperature: 30℃ or less ・Cooling water volume: 180L/h ・Accumulated time: 52827.1h★

・Power supply: 3-phase AC200V (50Hz), 3-phase AC220V (60Hz) ・Power (kW): 5.0 (50Hz)/6.0 (60Hz) ・Cooling water volume: Water-cooled 5-15L/min (5-32℃) ・Weight (kg): 131 ・Connectable refrigerator motor: 2-phase ・Cooling water inlet/outlet: Rc3/8★